EUV lithography

Extreme ultraviolet lithography (EUVL) is the principal lithography technology aiming to manufacture computer chips beyond the current 193-nm-based optical lithography, and recent progress has been made on several EUV light sources, optics, optics metrology, contamination control, masks and mask handling, and resists. This comprehensive volume is comprised of contributions from the world's leading EUVL researchers and provides all of the critical information needed by practitioners and those wanting an introduction to the field. Contents The history of EUV Lithography EUV source technology (requirements, technology descriptions, and status) EUV optics (projection system design, multilayer coatings, and substrates) Various EUV wavefront measurement techniques for optical testing Contamination and its control in EUVL scanners (optics and collector optics contamination) EUV mask and mask metrology (substrates, blank fabrication, absorber stacks and bac